Array Of Gated Devices And Methods Of Forming An Array Of Gated Devices

摘要

An array of gated devices includes a plurality of gated devices arranged in rows and columns and individually including an elevationally inner region, a mid region elevationally outward of the inner region, and an elevationally outer region elevationally outward of the mid region. A plurality of access lines are individually laterally proximate the mid regions along individual of the rows. A plurality of data/sense lines are individually elevationally outward of the access lines and electrically coupled to the outer regions along individual of the columns. A plurality of metal lines individually extends along and between immediately adjacent of the rows elevationally inward of the access lines. The individual metal lines are directly against and electrically coupled to sidewalls of the inner regions of each of immediately adjacent of the rows. The metal lines are electrically isolated from the data/sense lines. Other arrays of gated devices and methods of forming arrays of gated devices are disclosed.

主权项

1. A method of forming an array of gated devices, the gated devices being arranged in rows and columns and comprising an elevationally inner region, a mid region elevationally outward of the inner region, and an elevationally outer region elevationally outward of the mid region, the method comprising:
forming metal lines within bottoms of trenches between walls that longitudinally extend along one of rows or columns; forming pillars individually to comprise the mid region and the outer region of individual gated devices; forming a plurality of access lines elevationally outward of the metal lines and that individually are laterally proximate the mid regions along individual of the rows; forming a plurality of data/sense lines that individually are elevationally outward of the access lines and electrically coupled to the outer regions along individual of the columns; and the metal lines being formed to individually longitudinally extend along and between immediately adjacent the one of the rows or columns and being directly against and electrically coupled to sidewalls of the inner regions of each of immediately adjacent of the rows or columns, the metal lines being electrically isolated from the data/sense lines.