| 摘要 |
The present invention relates to an apparatus for inspecting a large-area plane that inspects the surface of a large-area raw material by using different optical characteristics in a lit room and in a dark room. The apparatus for inspecting a large-area plane, according to the present invention, comprises: a transfer unit (10) that moves an object (P) to be inspected, the surface of which is formed to be flat, in a predetermined direction therein; a first inspection unit (20) that performs line-by-line scanning of the surface of the object (P) to be inspected, which is being transferred, to take an image of the surface of the object (P) to be inspected, thereby inspecting for scratches and foreign substances; and a second inspection unit (30) that applies a laser beam to the surface of the object (P) to be inspected and detects the pattern of reflective light, which is reflected from the surface of the object (P) to be inspected, to inspect the flatness of the object (P) to be inspected. |
