发明名称 |
GAS MEASUREMENT APPARATUS, MULTIPLE-DEVICE SUBSTRATE, MANUFACTURING METHODS THEREFOR, AND METHODS FOR MANUFACTURING INFRARED LIGHT SOURCE AND PYROELECTRIC INFRARED SENSOR |
摘要 |
This invention provides the following: a gas measurement apparatus, a multiple-device substrate, an infrared light source, and a pyroelectric infrared sensor that can be manufactured via a simple process; and manufacturing methods therefor. The aforementioned gas measurement apparatus has an infrared light source, a sensor, and a gas cell and is characterized in that: the infrared light source has a first upper electrode, a first intermediate layer, and a first lower electrode; and the sensor has a second upper electrode made of the same material as the first upper electrode, a second intermediate layer made of the same material as the first intermediate layer, and a second lower electrode made of the same material as the first lower electrode. |
申请公布号 |
WO2016024503(A1) |
申请公布日期 |
2016.02.18 |
申请号 |
WO2015JP72189 |
申请日期 |
2015.08.05 |
申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
YAMAMOTO, KANSHO;ITO, SHIGEO;KOMODA, JUNYA |
分类号 |
G01N21/3504;G01J1/02;G01J1/04 |
主分类号 |
G01N21/3504 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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