发明名称 GAS MEASUREMENT APPARATUS, MULTIPLE-DEVICE SUBSTRATE, MANUFACTURING METHODS THEREFOR, AND METHODS FOR MANUFACTURING INFRARED LIGHT SOURCE AND PYROELECTRIC INFRARED SENSOR
摘要 This invention provides the following: a gas measurement apparatus, a multiple-device substrate, an infrared light source, and a pyroelectric infrared sensor that can be manufactured via a simple process; and manufacturing methods therefor. The aforementioned gas measurement apparatus has an infrared light source, a sensor, and a gas cell and is characterized in that: the infrared light source has a first upper electrode, a first intermediate layer, and a first lower electrode; and the sensor has a second upper electrode made of the same material as the first upper electrode, a second intermediate layer made of the same material as the first intermediate layer, and a second lower electrode made of the same material as the first lower electrode.
申请公布号 WO2016024503(A1) 申请公布日期 2016.02.18
申请号 WO2015JP72189 申请日期 2015.08.05
申请人 MURATA MANUFACTURING CO., LTD. 发明人 YAMAMOTO, KANSHO;ITO, SHIGEO;KOMODA, JUNYA
分类号 G01N21/3504;G01J1/02;G01J1/04 主分类号 G01N21/3504
代理机构 代理人
主权项
地址