Rotational and Axial Motion System and Methods of Use

摘要

A sample manipulator includes a drive system, a pair of flexure plates, and piezoelectric actuators. The drive system preferably includes a pair of drive pulleys on opposite sides of a driven pulley and coupled to the driven pulley by a drive belt. The sample rotates around a rotational axis with the driven pulley. The driven pulley is preferably driven by a pair of drive belts, one being located above the sample, and the other being located below the sample. Fluid bearings provide improved rotation of the driven pulley. The flexure plates are preferably monolithic with a high number of machined flex veins with the side of a tapered threaded screw being used to create the high force required to bend many flexures at the same time for sample motion and to provide fine, precise sub-micron motion control. The piezoelectric actuators provide high-precision control of the load on the sample.

主权项

1. A sample manipulator for high-precision manipulation of a sample, the sample manipulator comprising:
a sample stage comprising a sample holder for receiving the sample and maintaining the sample on a rotational axis, the sample stage having a top and a bottom; a top fluid bearing spool coupled to the top of the sample stage; a top fluid flow rotation shaft rotatable within a top fluid flow rotation bushing and coupled to the top fluid bearing spool, the top fluid flow rotation shaft being rotatable about the rotational axis; a bottom fluid bearing spool coupled to the bottom of the sample stage; and a bottom fluid flow rotation shaft coaxial with the top fluid flow rotation shaft, rotatable within a bottom fluid flow rotation bushing, and coupled to the bottom fluid bearing spool, the bottom fluid flow rotation shaft being rotatable about the rotational axis; wherein the top fluid bearing spool and the bottom fluid bearing spool are fluid flow bearing assemblies containing a fluid.