发明名称 ダイボンダ及びボンディング方法
摘要 A die bonder includes a die supply stage, which is configured to hold a wafer; a first head having a first collet, which is configured to pick up a die from the wafer and to attach the die, provisionally, on a target to be conducted with mounting thereon, on the attach stage; a second head having a second collet, which is configured to conduct main compression of the die, which is provisionally attached on the attach stage, on the target to be conducted with mounting; and a controller apparatus, wherein the controller apparatus controls the first head to pick up a next die from the die supply stage, during when the second head conducts the main compression on the die onto the target to be conducted with mounting, thereby achieving the die bonder and the die bonding method being stable in quality.
申请公布号 JP5865639(B2) 申请公布日期 2016.02.17
申请号 JP20110202275 申请日期 2011.09.15
申请人 ファスフォードテクノロジ株式会社 发明人 牧 浩;望月 政幸;谷 由貴夫;望月 威人
分类号 H01L21/52;H01L21/60 主分类号 H01L21/52
代理机构 代理人
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