发明名称 Method for producing an integrated optical circuit and respective circuit
摘要 A method for producing an integrated optical circuit comprising an active device and a passive waveguide circuit includes: applying (501) an active waveguide structure (510, 511, 512) on a source wafer substrate (514); exposing (502) a portion (522) of the source wafer substrate (514) by selectively removing the active waveguide structure (510, 511, 512); applying (503) a passive waveguide structure (531, 532, 533) on the exposed portion (522) of the source wafer substrate (514), wherein an aggregation of the active waveguide structure (510, 511, 512) and the passive waveguide structure (531, 532, 533) forms the active device (550), the active device (550) having a bottom surface facing the source wafer substrate (514); removing (505) the source wafer substrate (514) from the active device (550); and attaching (506) the active device (550) to a target substrate (562) comprising the passive waveguide circuit such that the bottom surface of the active device (550) faces the target substrate (562).
申请公布号 EP2985645(A1) 申请公布日期 2016.02.17
申请号 EP20140180862 申请日期 2014.08.13
申请人 HUAWEI TECHNOLOGIES CO., LTD. 发明人 COLLINS, TOM;TASSAERT, MARTIN
分类号 G02B6/12;G02B6/13;H01S3/063;H01S5/22 主分类号 G02B6/12
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