Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus by using the same, and organic light-emitting display apparatus manufactured by the method

摘要

An organic layer deposition apparatus includes: a conveyer unit (400) including a transfer unit (430) for attaching a substrate (2), a first conveyer unit (410), and a second conveyer unit (420); and a deposition unit (100) including a vacuum chamber (101) and an organic layer deposition assembly (100-1,...,100-11) for depositing an organic layer on the substrate. The organic layer deposition assembly includes: a deposition source (110) for discharging a deposition material; a deposition source nozzle unit (120) including a plurality of deposition source nozzles; a patterning slit sheet (130) including a plurality of patterning slits that are arranged in a first direction; and a deposition source shutter that moves in the first direction, and selectively blocks the deposition material that is vaporized in the deposition source. The transfer unit moves between the first and second conveyer units. The transfer unit keeps the attached substrate spaced apart from the organic layer deposition assembly while being transferred by the first conveyer unit.