发明名称 |
SILICON CONTAINING COATING COMPOSITIONS AND METHODS OF USE |
摘要 |
Coating compositions include a polymer including: wherein R1 is a silicon containing moiety, R2 is an acid stable lactone functionality, and R3 is an acid labile lactone functionality; X1, X2, X3 are independently H or CH3; and m and o are non-zero positive integers and n is zero or a positive integer representing the number of repeat units; a photoacid generator; and a solvent. Also disclosed are methods for forming a pattern in the coating composition containing the same. |
申请公布号 |
GB2487129(B) |
申请公布日期 |
2016.02.17 |
申请号 |
GB20120000145 |
申请日期 |
2010.09.14 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
RATNAM SOORIYAKUMARAN;ROBERT DAVID ALLEN;PHILLIP JOE BROCK;SALLY ANN SWANSON;ALEXANDER FRIZ;WU-SONG HUANG;KUANG-JUNG CHEN;HOA TRUONG |
分类号 |
C09D143/04;G03F7/00;G03F7/075 |
主分类号 |
C09D143/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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