发明名称 OPTICAL FILTER AND ANALYTICAL INSTRUMENT
摘要 An optical filter (1) comprises a first substrate (3); a second substrate (2) disposed so as to be opposed to the first substrate (3); a first mirror (4B) disposed between the first substrate (3) and the second substrate (2); a second mirror (4A) disposed between the first mirror (4B) and the second substrate(2); a first electrode (6B) disposed between the first substrate (3) and the second substrate (2); a second electrode (6A) disposed between the first electrode (6B) and the second substrate (2), wherein the second substrate has a groove (8) surrounding the second mirror (4A) in a plan view, the groove (8) includes a first curved surface (8b) between a first side surface (8c) and a bottom surface (8a), and the material of the first and second substrates (2, 3) is a glass.
申请公布号 EP2985657(A1) 申请公布日期 2016.02.17
申请号 EP20150185426 申请日期 2011.03.17
申请人 SEIKO EPSON CORPORATION 发明人 SHINTO, SUSUMU;YAMAZAKI, SEIJI
分类号 G03F7/20;G01J3/26;G02B5/20;G02B5/28;G02B26/00;G02F1/00;G02F1/21 主分类号 G03F7/20
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