发明名称 |
OPTICAL FILTER AND ANALYTICAL INSTRUMENT |
摘要 |
An optical filter (1) comprises a first substrate (3); a second substrate (2) disposed so as to be opposed to the first substrate (3); a first mirror (4B) disposed between the first substrate (3) and the second substrate (2); a second mirror (4A) disposed between the first mirror (4B) and the second substrate(2); a first electrode (6B) disposed between the first substrate (3) and the second substrate (2); a second electrode (6A) disposed between the first electrode (6B) and the second substrate (2), wherein the second substrate has a groove (8) surrounding the second mirror (4A) in a plan view, the groove (8) includes a first curved surface (8b) between a first side surface (8c) and a bottom surface (8a), and the material of the first and second substrates (2, 3) is a glass. |
申请公布号 |
EP2985657(A1) |
申请公布日期 |
2016.02.17 |
申请号 |
EP20150185426 |
申请日期 |
2011.03.17 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
SHINTO, SUSUMU;YAMAZAKI, SEIJI |
分类号 |
G03F7/20;G01J3/26;G02B5/20;G02B5/28;G02B26/00;G02F1/00;G02F1/21 |
主分类号 |
G03F7/20 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|