发明名称 HIGH THERMAL STABILITY REFERENCE STRUCTURE WITH OUT-OF-PLANE ANISOTROPY FOR MAGNETIC DEVICE APPLICATIONS
摘要 Enhanced Hc and Hk in addition to higher thermal stability up to at least 400° C. are achieved in magnetic devices by adding dusting layers on top and bottom surfaces of a spacer in a synthetic antiferromagnetic (SAF) structure to give a RL1/DL1/spacer/DL2/RL2 reference layer configuration where RL1 and RL2 layers exhibit perpendicular magnetic anisotropy (PMA), the spacer induces antiferromagnetic coupling between RL1 and RL2, and DL1 and DL2 are dusting layers that enhance PMA. Dusting layers are deposited at room temperature to 400° C. RL1 and RL2 layers are selected from laminates such as (Ni/Co)n, L10 alloys, or rare earth-transition metal alloys. The reference layer may be incorporated in STT-MRAM memory elements or in spintronic devices including a spin transfer oscillator. Dusting layers and a similar SAF design may be employed in a free layer for Ku enhancement and to increase the retention time of a memory cell for STT-MRAM designs.
申请公布号 EP2820681(A4) 申请公布日期 2016.02.17
申请号 EP20130754577 申请日期 2013.01.24
申请人 HEADWAY TECHNOLOGIES, INC.;WANG, YU-JEN;KULA, WITOLD;TONG, RU-YING;JAN, GUENOLE 发明人 WANG, YU-JEN;KULA, WITOLD;TONG, RU, YING;JAN, GUENOLE
分类号 H01L29/82 主分类号 H01L29/82
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