发明名称 露光装置、マスク、及び、光学フィルム
摘要 Provided is an exposure apparatus including a transporting section; a first polarized light output section that outputs first polarized light; a second polarized light output section that outputs second polarized light; a first mask section that has formed therein a first aperture section that passes the first polarized light for exposing an orientation film and blocks the first polarized light; and a second mask section that has formed therein a second aperture section that passes the second polarized light for exposing the orientation film and blocks the second polarized light. The first aperture section and the second aperture section are formed to expose a certain region of the orientation film in an overlapping manner.
申请公布号 JP5866028(B2) 申请公布日期 2016.02.17
申请号 JP20140543010 申请日期 2012.10.26
申请人 株式会社有沢製作所 发明人 梅澤 康昭;佐藤 達弥;浦 和宏;渡部 賢一;角張 祐一
分类号 G03F7/20;G02F1/13363;G02F1/1337;H01L21/027 主分类号 G03F7/20
代理机构 代理人
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