ＣＡＤベースの位置合わせのためのシステム、方法、及びコンピュータプログラム製品

摘要

A system for location based wafer analysis, the system comprising: (i) a first input interface; (ii) a second input interface; (iii) a correlator; and (iv) a processor, configured to generate inspection results for the inspected wafer, with the help of at least one frame run-time displacement.