发明名称 回折格子の製造方法
摘要 A manufacturing method of a Blazed diffraction grating configured to diffract incident light and made of a CdTe or CdZnTe crystal material includes the step of forming a plurality of grating grooves in a processed surface of a work through machining using a processing machine for the Blazed diffraction grating. The forming step forms the grating grooves so that among surfaces of gratings formed by the forming step, a surface that receives the incident light most is set to a (110) plane as a crystal orientation of the crystal material.
申请公布号 JP5864920(B2) 申请公布日期 2016.02.17
申请号 JP20110151277 申请日期 2011.07.07
申请人 キヤノン株式会社 发明人 助川 隆;杉山 成
分类号 G02B5/18 主分类号 G02B5/18
代理机构 代理人
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