| 摘要 |
PROBLEM TO BE SOLVED: To provide a cantilever type probe card needle standing technique allowing probe needles to be mounted at required positions with intervals of only 50 μm, and realizing full automation of a manufacturing process with a high productivity.SOLUTION: A cantilever type probe card needle standing technique comprises: a ceramic ring setting step of setting a ceramic ring; a probe needle sucking and fastening step of sucking and fastening rear end portions of probe needles; a probe needle positioning step; a probe needle immobilization first step of dropping ultraviolet curable resin and irradiating ultraviolet rays; a probe needle second immobilization step of dropping epoxy resin to partially cover the probe needles and thermally curing by an optical heating spot heater; and a ceramic ring bonding step of bonding the ceramic ring after the probe needle second immobilization step to a predetermined position on a probe card substrate. |
