| 摘要 |
PROBLEM TO BE SOLVED: To provide a chemical solution supplying apparatus which supplies chemical solution by a simple constitution and at a high-accuracy ratio.SOLUTION: A chemical solution supplying apparatus supplies chemical solution in a first chemical solution tank 3 and a second chemical solution tank 4 at a predetermined ratio. A rigid body 1 capable of rotating around a fulcrum 2 is allowed to support the first chemical solution tank 3 at a position with a first distance L1 from the fulcrum 2 to give the rigid body 1 rotational moment by mass of the first chemical solution tank 3 and by the first distance L1, and allowed to support the second chemical solution tank 4 at a position with a second distance L2 from the fulcrum 2 so as to cancel the rotational moment. The apparatus comprises: detection means 7 for detecting the fact that mass of the chemical solution in the first chemical solution tank 3 reduced due to supplying of the chemical solution in the first chemical solution tank 3 and balance of the rigid body 1 is lost; and supplying means for increasing a supply amount of the chemical solution in the second chemical solution tank 4 and reducing the chemical solution in the second chemical solution tank 4 by the detection means 7, and each time when the balance of the rigid body 1 is lost, the chemical solution in the second chemical solution tank 4 is reduced to maintain the balance of the rigid body 1. |
