EVAPORATING SOURCE FOR PRODUCING THIN FILM

摘要

The present invention relates to an evaporating source for forming a thin film. The evaporating source according to the present invention includes a crucible which stores a deposition material; and inner plates which touch the inner surface of the crucible, are separated in the vertical direction of the crucible, and have at least one opening part respectively. Thereby, the injection pressure of the evaporated deposition material can be easily controlled. The components of the evaporated deposition material are uniformly mixed by increasing a traveling distance in the crucible of the injected deposition material. So, a thin film with uniform composition can be obtained. The thickness profile of the thin film can be made uniform by controlling the inner pressure of the crucible.