| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate treatment method which can excellently prevent a substrate from being broken during peeling off of the substrate, that is, which is excellent in yield. <P>SOLUTION: A substrate treatment method includes, in this order, the steps of: (1) obtaining a laminate by provisionally fixing the substrate onto a support via a provisional fixation material containing a cycloolefin polymer (A) and an ultraviolet absorber (B); (2) processing the substrate and/or moving the laminate; (3) irradiating the provisional fixation material with ultraviolet rays from the support side; and (4) peeling off the substrate from the support. <P>COPYRIGHT: (C)2013,JPO&INPIT |
