| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laminate formed of a polyimide film and a support used as a base material for laminating various devices, configured to prevent the laminate from being separated even in a high temperature process in manufacturing the device and to allow easy separation of the polyimide film from the support after producing the device on the polyimide film. <P>SOLUTION: A film, as a polyimide film 6, has a surface which is opposite at least the support 1 and plasma-treated. A patterning process of forming an easy-to-bond part and an easy-to-separate part which are different in adhesive/separation strength and almost the same in surface roughness is performed on at least one of facing surfaces of the support 1 and the polyimide film 6 using a coupling agent, and thereafter the support and the polyimide film are superimposed and pressed and heated. The polyimide film 6 is obtained by reaction between a diamine which mainly contains an aromatic diamine at least 70 mol% of which has a benzoxazole structure and a tetracarboxylic acid. <P>COPYRIGHT: (C)2013,JPO&INPIT |
