| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress complication of a device configuration and accompanying cost increase and such, and to suppress a temperature fluctuation of a developer at an exposed part of a piping, which is not covered with a thermal insulation jacket. <P>SOLUTION: In the resist developing device, comprising: a developer supply pipe; and a temperature holding part, which coats the developer supply pipe, and in which a thermostatic control medium flows, the developer supply pipe includes: a coating part covered with the temperature holding part; and an exposed part, which is not covered with the temperature holding part. In the temperature holding part, a lead-out part which leads the thermostatic control medium to the exposed part is provided. <P>COPYRIGHT: (C)2013,JPO&INPIT |
