发明名称 |
Joining device and joining position adjustment method using joining device |
摘要 |
A joining device includes a first holding unit configured to load and hold the first member on its top surface; a second holding unit disposed above the first holding unit while facing the first holding unit and configured to hold the second member; and a position adjustment mechanism configured to adjust a joining position between the first member held by the first holding unit and the second member held by the second holding unit. The second holding unit is of a circular plate shape, and the position adjustment mechanism includes four position-adjusting cam members disposed at equal intervals along an outer peripheral surface of the second holding unit, and moves the second holding unit in a horizontal direction. |
申请公布号 |
US9263312(B2) |
申请公布日期 |
2016.02.16 |
申请号 |
US201214351425 |
申请日期 |
2012.09.13 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
Nakamura Michikazu;Sugiyama Masahiko;Furuya Hajime;Akiyama Naoki;Omori Yosuke |
分类号 |
B32B41/00;H01L21/68;H01L21/67 |
主分类号 |
B32B41/00 |
代理机构 |
Nath, Goldberg & Meyer |
代理人 |
Nath, Goldberg & Meyer ;Meyer Jerald L. |
主权项 |
1. A joining device for joining a first member and a second member having a plate shape, the joining device comprising:
a first holding unit configured to load and hold the first member on its top surface; a second holding unit disposed above the first holding unit while facing the first holding unit and configured to hold the second member; and a position adjustment mechanism configured to adjust a joining position between the first member held by the first holding unit and the second member held by the second holding unit, wherein the second holding unit is of a circular plate shape, and the position adjustment mechanism includes four position-adjusting cam members disposed at equal intervals along an outer peripheral surface of the second holding unit, and moves the second holding unit in a horizontal direction, wherein the position adjustment mechanism further includes an angle-adjusting cam member configured to press a protrusion formed on the outer peripheral surface of the second holding unit to rotate the second holding unit in a horizontal plane about a center of the circular shape of the second holding unit as a center of rotation, and wherein the position-adjusting cam member and the angle-adjusting cam member include:
a cylindrical outer peripheral ring;a columnar eccentric cam provided in the outer peripheral ring through a bearing set; anda drive shaft configured to drive the eccentric cam. |
地址 |
Tokyo JP |