发明名称 Joining device and joining position adjustment method using joining device
摘要 A joining device includes a first holding unit configured to load and hold the first member on its top surface; a second holding unit disposed above the first holding unit while facing the first holding unit and configured to hold the second member; and a position adjustment mechanism configured to adjust a joining position between the first member held by the first holding unit and the second member held by the second holding unit. The second holding unit is of a circular plate shape, and the position adjustment mechanism includes four position-adjusting cam members disposed at equal intervals along an outer peripheral surface of the second holding unit, and moves the second holding unit in a horizontal direction.
申请公布号 US9263312(B2) 申请公布日期 2016.02.16
申请号 US201214351425 申请日期 2012.09.13
申请人 TOKYO ELECTRON LIMITED 发明人 Nakamura Michikazu;Sugiyama Masahiko;Furuya Hajime;Akiyama Naoki;Omori Yosuke
分类号 B32B41/00;H01L21/68;H01L21/67 主分类号 B32B41/00
代理机构 Nath, Goldberg & Meyer 代理人 Nath, Goldberg & Meyer ;Meyer Jerald L.
主权项 1. A joining device for joining a first member and a second member having a plate shape, the joining device comprising: a first holding unit configured to load and hold the first member on its top surface; a second holding unit disposed above the first holding unit while facing the first holding unit and configured to hold the second member; and a position adjustment mechanism configured to adjust a joining position between the first member held by the first holding unit and the second member held by the second holding unit, wherein the second holding unit is of a circular plate shape, and the position adjustment mechanism includes four position-adjusting cam members disposed at equal intervals along an outer peripheral surface of the second holding unit, and moves the second holding unit in a horizontal direction, wherein the position adjustment mechanism further includes an angle-adjusting cam member configured to press a protrusion formed on the outer peripheral surface of the second holding unit to rotate the second holding unit in a horizontal plane about a center of the circular shape of the second holding unit as a center of rotation, and wherein the position-adjusting cam member and the angle-adjusting cam member include: a cylindrical outer peripheral ring;a columnar eccentric cam provided in the outer peripheral ring through a bearing set; anda drive shaft configured to drive the eccentric cam.
地址 Tokyo JP