Semiconductor ESD device and method of making same

摘要

A semiconductor device includes an SCR ESD device region disposed within a semiconductor body, and a plurality of first device regions of the first conductivity type disposed on a second device region of the second conductivity type, where the second conductivity type is opposite the first conductivity type. Also included is a plurality of third device regions having a sub-region of the first conductivity type and a sub-region of the second conductivity type disposed on the second device region. The first regions and second regions are distributed such that the third regions are not directly adjacent to each other. A fourth device region of the first conductivity type adjacent to the second device region and a fifth device region of the second conductivity type disposed within the fourth device region are also included.

主权项

1. A method of operating a semiconductor device, the method comprising:
providing a protection device at a protected node, the protected node being coupled to circuitry in a semiconductor substrate, wherein the protected node is coupled to an anode of a SCR device, the SCR comprising:
a plurality of p-type first anode regions coupled to an n-type n-base region,a plurality of hybrid regions coupled to the n-type n-base region, the hybrid regions comprising a p-type second anode region and an n-type trigger region,a p-type p-base region coupled to the n-type n-base region, andan n-type cathode region coupled to the p-type p-base region, wherein
the plurality of hybrid regions are sparsely distributed among the first anode regions, andthe first anode regions are coupled to the second anode regions; and protecting the circuitry from a high voltage, wherein when the high voltage reaches a level that is greater than an operating level, current flows from a trigger device coupled to the n-type trigger region in the SCR device, wherein when the current flows from the trigger device into the n-type trigger region of the SCR, the SCR latches, causing a high current to flow from the anode regions of the of the SCR device to the cathode region of the SCR device.