Assembly to selectively etch at inkjet printhead

摘要

An assembly for selectively etching an inkjet printhead includes a substrate and printhead layers formed on the substrate. A bonding region can provide a location on the printhead layers for an electrical bond. An ink channeling region can be defined at least in part by the printhead layers. A mask layer can partially cover the printhead layers and include a first opening positioned over the bonding region and a second opening positioned over the ink channeling region. The assembly can also include a via at the first opening and a trench at the second opening having greater depth than the via.

主权项

1. A method of manufacturing an inkjet printhead, comprising:
forming a plurality of printhead layers on a substrate to provide a bonding region and an ink channeling region; applying a mask layer over the plurality of printhead layers, the mask layer including a first opening over the bonding region and a second opening over the ink channeling region; andetching the bonding region and the ink channeling region through the openings so that a via is formed at the bonding region and multiple layers of the plurality of printhead layers are etched through the second opening to form a trench at the ink channeling region and so that the trench has a depth that is greater than the via, wherein etching the bonding region and the ink channeling region further comprises:etching a passivation layer through the openings in the bonding region and the ink channeling region using a first combination of etchant materials at a first pressure and a first power level;etching an etching retardant layer in the bonding region and a dielectric layer in the plurality of layers in the ink channeling region using a second combination of etchant materials at a second pressure and a second power level; andcontinuing etching the dielectric layer using a third combination of etchant materials at the second pressure and the second power level.