| 摘要 |
The invention provides a polarized light irradiation apparatus and method for photo-alignment, which is capable of detecting the direction of a polarization axis of irradiated polarized light in high precision and performing photo-alignment treatment in high quality in the aspect of direction precision. A workpiece (W) is arranged on an irradiation surface (R). When the workpiece (W) is irradiated by the polarized light by virtue of irradiating the irradiation surface (R) through a polarized element (121), a polarization direction detector (40) is arranged on the irradiation surface (R) and detects the direction of the polarization axis of the polarized light. A polarization analyzer arranged in the polarization direction detector (40) is located in advance by a polarization analyzer calibrator, and a rotary original point is at a specified angle with respect to the reference direction of the apparatus. Based on the polarization direction detected by the polarization direction detector (40), the deviation of the polarization axis can be obtained and by using a polarized element adjusting mechanism (7) to adjust the posture of the polarized element (121), the deviation can be eliminated. |
