| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate alignment method and a device, capable of preventing a scratch which accompanies substrate positioning from being generated. <P>SOLUTION: The alignment method includes a step (d) of supporting a substrate S from a back side with a plurality of free ball bearings 15 and moving the substrate S to a target position by pressing a contact member 28 against an edge part e of the substrate S supported by the plurality of free ball bearings. <P>COPYRIGHT: (C)2013,JPO&INPIT |
