MEMS electrostatic actuator

摘要

A MEMS electrostatic actuator includes a bottom plate affixed to a substrate and a top plate suspended above the bottom plate. The top plate has a parallel plate center section and two rotating members electrically connected to the center section. Each rotating member is attached centrally of the rotating member for rotation about an axis of rotation to a set of anchor posts. The attachment includes at least one pair of torsional springs attached along each axis, each spring comprising a rectangular metal square that twists as the rotational members rotate. Electrostatic pull-down electrodes are underneath each rotational member.

主权项

1. A MEMS electrostatic actuator device comprising an array of MEMS actuators, each MEMS actuator comprising:
a bottom plate affixed to a substrate, wherein the bottom plate is a signal electrode; a top plate suspended above the bottom plate; the top plate comprising a parallel plate center section and two rotating drive members electrically connected to the center section, wherein the center section has openings to reduce stiction; each rotating drive member is attached to a set of anchor posts, wherein the rotating drive members enable vertical movement of the center section; and electrostatic pull-down electrodes underneath each rotating drive member.