Methods and apparatus for treating fluorinated greenhouse gases in gas streams

摘要

A method for removing fluorinated greenhouse gas from a gas stream comprises reacting at least one fluorinated greenhouse gas in a gas stream with at least one of a silane-based and a borane-based compound to provide an abated gas stream. An apparatus for removing fluorinated greenhouse gases from a gas stream comprises a fluorinated gas decomposer unit configured to decompose fluorinated greenhouse gases in a gas stream. The apparatus further comprises a silane-based or a borane-based compound introduction unit configured to introduce at least one of a silane-based and a borane-based compound into the fluorinated gas decomposer unit.

主权项

1. A method of removing fluorinated greenhouse gases from a gas stream, the method comprising:
contacting a gas stream comprising at least one fluorinated greenhouse gas with a silane-based compound to spontaneously react the at least one fluorinated greenhouse gas and the silane-based compound, the reaction providing an abated gas stream comprising silicon tetrafluoride (SiF4) and hydrofluoric acid (HF); removing the silicon tetrafluoride; and removing the hydrofluoric acid.