| 摘要 |
<P>PROBLEM TO BE SOLVED: To configure a compact, low power-consumption, and low-cost hydrogen gas sensor having a high selectivity of hydrogen gas. <P>SOLUTION: An airtight cavity space ES is vacuum or reduced-pressure environment. When there is hydrogen gas around a hydrogen gas sensor 101, the hydrogen gas permeates through a hydrogen gas-permeable cover 4 and enters inside the cavity ES. On the other hand, nitrogen gas and oxygen gas other than the hydrogen gas do not permeate therethrough. A Q value of an oscillator 11 inside the cavity ES changes according to a hydrogen gas partial pressure. The oscillator 11 is driven by an oscillator driving/detecting circuit and the Q value is detected by an amplitude thereof. The hydrogen gas partial pressure is detected by the change in the Q value. <P>COPYRIGHT: (C)2013,JPO&INPIT |
