摘要 |
A sample for electron microscopy includes a base member and a sensor. The sensor is configured to measure data on the sample. The sensor includes an insulating member and a measuring element. The insulating member is deposited in or near an area of observation that is defined on a surface of the base member. The measuring element is deposited on a surface of the insulating member or over the surface of the base member and the surface of the insulating member. |