发明名称 ワイヤーソーとワイヤーソーを用いたシリコン製造方法
摘要 <P>PROBLEM TO BE SOLVED: To prevent wire from being derailed out of V-grooves of a multi-groove roller, while achieving a long life of the multi-groove roller, in a multi-wire saw. <P>SOLUTION: The wire saw includes the wire 2 wound between a plurality of multi-groove rollers 1a, 1b rotatably arranged, which is configured to slice a workpiece 3 by relatively pressing the wire 2 against the workpiece 3, wherein rotatable pressing rollers 11a, 11b for pressing the wire 2 against the multi-groove rollers 1a, 1b in the vicinity of an outlet where the wire 2 is separated from the multi-groove rollers 1a, 1b, and in the vicinity of an inlet where the wire 2 initiates to come into contact with the multi-groove rollers 1a, 1b, thereby achieving the long life of the multi-groove roller 1 and preventing the wire 2 from being derailed out of the V grooves. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP5861062(B2) 申请公布日期 2016.02.16
申请号 JP20110153395 申请日期 2011.07.12
申请人 パナソニックIPマネジメント株式会社 发明人 高橋 正行;山本 雄士
分类号 B24B27/06;B28D5/04;H01L21/304 主分类号 B24B27/06
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