| 摘要 |
The invention discloses a dispersing plate and a film coating device provided with the dispersing plate. The dispersing plate is provided with an effective area and an inactive area arranged at the periphery of the effective area, wherein the effective area has a plurality of air vents distributed uniformly for penetrating air; and the inactive area corresponds to the position of an inactive area of a base plate to be coated with the film, the inactive area is used for connecting the dispersing plate with an external device, and the inactive area is provided with a plurality of cutting lines. After the dispersing plate and the film coating device provided with the dispersing plate are used, the deformation of the dispersing plate can be reduced, the gas distribution can be improved, the stability of the gas distribution in an electrode device can be improved, and the film thickness uniformity of the film coating device can be improved. |
