发明名称 |
Method for supplying source gas for producing polycrystalline silicon and polycrystalline silicon |
摘要 |
In a method according to the present invention, an occurrence ratio of popcorn is suppressed by adjusting kinetic energy of a source gas supplied to a reaction furnace for producing polycrystalline silicon with a Siemens method (flow velocity and a supply amount of the source gas in source gas supply nozzle ejection ports). Specifically, in performing deposition reaction of the polycrystalline silicon under a reaction pressure of 0.25 MPa to 0.9 MPa, when flow velocity of the source gas in gas supply ports of the source gas supply nozzles (9) is represented as u (m/sec), a source gas supply amount is represented as Q (kg/sec), and an inner volume of the reaction furnace (100) is represented as V (m3), values of u and Q of each of the source gas supply nozzles (9) are set such that a total Σ(Q×u2/V) of values Q×u2/V is equal to or larger than 2500 (kg/m·sec3). |
申请公布号 |
US9263261(B2) |
申请公布日期 |
2016.02.16 |
申请号 |
US201314435316 |
申请日期 |
2013.09.30 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
Kurosawa Yasushi;Netsu Shigeyoshi |
分类号 |
C23C16/24;C23C16/50;C01B33/027;H01L21/02;C01B33/02;C01B33/035 |
主分类号 |
C23C16/24 |
代理机构 |
Oblon, McClelland, Maier & Neustadt, L.L.P. |
代理人 |
Oblon, McClelland, Maier & Neustadt, L.L.P. |
主权项 |
1. A method of supplying a source gas to a reaction furnace for producing polycrystalline silicon with a Siemens method, the method comprising:
using a reaction furnace in which one or more source gas supply nozzles are disposed such that a flow pattern of the source gas in the reaction furnace is an ascending current in a reaction furnace center portion and is a descending current in a reaction furnace outer wall side portion; and setting, in performing deposition reaction of the polycrystalline silicon under a reaction pressure of 0.25 MPa to 0.9 MPa, when flow velocity of the source gas in gas supply ports of the source gas supply nozzles is represented as u (m/sec), a source gas supply amount is represented as Q (kg/sec), and an inner volume of the reaction furnace is represented as V (m3), values of u and Q of each of the source gas supply nozzles such that a total Σ(Q×u2/V) of values Q×u2/V is equal to or larger than 2500 (kg/m·sec3). |
地址 |
Tokyo JP |