High temperature pressure sensor

摘要

A pressure sensor assembly includes a pressure sensor having a pressure sensing transducer connected to a plurality of electrode pins via a plurality of electrode pads disposed on the transducer, an inner casing configured to hold the pressure sensing transducer including a plurality of inner casing electrode pin channels having the electrode pins disposed therein. The pressure sensor further includes an outer casing holding the inner casing therein having a capsule header with a plurality of capsule header electrode pin channels defined therein which can include a ceramic seal disposed therein such that the capsule header electrode pin channels engage the electrode pins in an insulating sealed relationship. The outer casing further includes an isolator plate including an isolator plate fluid port defined therein and a pressure isolator disposed on the isolator plate and configured to deflect in response to a change in ambient pressure. The pressure sensor includes a pressure transmitting fluid disposed in the fluid volume.

主权项

1. A pressure sensor assembly, comprising:
a pressure sensor having a pressure sensing transducer connected to a plurality of electrode pins for transmitting an electrical signal, the pressure sensing transducer being connected to the electrode pins via a plurality of electrode pads disposed on the pressure sensing transducer via a wire bond; an inner casing configured to hold the pressure sensor in a sensor pocket having a pocket volume larger than the sensor volume, the inner casing further including a plurality of inner casing electrode pin channels having the electrode pins disposed therein, the inner casing electrode pin channels defined in a first inner casing side and a fluid port defined in a second inner casing side; an outer casing holding the inner casing therein including:
a capsule header having a plurality of capsule header electrode pin channels defined therein, wherein the capsule header receives the first inner casing side, the capsule header electrode pin channels including a ceramic seal disposed therein such that the capsule header electrode pin channels engage the electrode pins in an insulating sealed relationship;an isolator plate disposed over the second inner casing side and in contact with the capsule header, the isolator plate including an isolator plate fluid port defined therein; anda pressure isolator disposed on the isolator plate and configured to deflect in response to a change in ambient pressure; a fluid volume defined by a total remaining volume inside the inner casing and the outer casing combined; and a pressure transmitting fluid disposed in the fluid volume.