基板処理装置および基板処理方法,申请号JP20120068944-传众专利搜索

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发明名称	基板処理装置および基板処理方法
摘要
申请公布号	JP5859888(B2)	申请公布日期	2016.02.16
申请号	JP20120068944	申请日期	2012.03.26
申请人	株式会社ＳＣＲＥＥＮホールディングス	发明人	北川広明
分类号	H01L21/027;H01L21/304	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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