Movable support, position control system, lithographic apparatus and method of controlling a position of an exchangeable object

摘要

A movable support is configured to hold an exchangeable object. The support includes a movable structure movably arranged with respect to a reference object, an object holder movably arranged with respect to the movable structure and configured to hold the exchangeable object, an actuator configured to move the movable structure with respect to the reference object, and an ultra short stroke actuator configured to move the object holder with respect to the movable structure, wherein a stiffness of the ultra short stroke actuator is substantially larger than a stiffness of the at least one actuator.

主权项

1. A movable support configured to hold an exchangeable object, the support comprising:
a movable structure movably arranged with respect to a reference object; an object holder arranged over, and movable with respect to, the movable structure, the object holder including an upper surface to receive a lower surface of the exchangeable object and configured to hold and bear a weight of the exchangeable object from the lower surface of the exchangeable object, the object holder being supported by the movable structure; an actuator configured to move the movable structure with respect to the reference object; and an ultra short stroke actuator configured to move the object holder with respect to the movable structure, wherein a stiffness of the ultra short stroke actuator is substantially larger than a stiffness of the actuator, and wherein the ultra short stroke actuator is configured to move the object holder with respect to the movable structure to compensate for an error between a measured position of the movable structure and a desired position of the movable structure.