Chromatic confocal system

摘要

A system for determining surface topography of a three-dimensional structure is provided. The system can include an illumination unit configured to output a two-dimensional array of light beams each comprising a plurality of wavelengths. An optical assembly can focus the plurality of wavelengths of each light beam to a plurality of focal lengths so as to simultaneously illuminate the structure over a two-dimensional field of view. A detector and a processor are used to generate data representative of the surface topography of the three-dimensional structure based on the measured characteristics of the light reflected from the structure.

主权项

1. A system for measuring surface topography of a three-dimensional structure, the system comprising:
an illumination unit configured to output a two-dimensional array of light beams each comprising a plurality of wavelengths; an optical assembly operatively coupled to the illumination unit and configured to focus the plurality of wavelengths of each light beam to a plurality of focal lengths relative to the optical assembly so as to simultaneously illuminate the structure over a two-dimensional field of view; wherein the plurality of focal lengths is fixed relative to the optical assembly during the measuring of the surface topography; a detector configured to measure a characteristic of light reflected from the structure for each of a plurality of locations distributed in two dimensions over the field of view; and, a processor coupled with the detector and configured to generate data representative of the surface topography of the structure based on the measured characteristics of the light reflected from the structure.