TERAHERTZ SPECTROMETER FOR GAS ANALYSIS

摘要

The present invention relates to a terahertz spectrometer for gas analysis wherein reference gas and sample gas can be measured simultaneously, the spectrometer can be miniaturized using a waveguide, analysis can be conducted even using a small amount of gas, manufacturing costs can be minimized while increasing the accuracy of analysis using a differential detection method, and measurement time can be minimized. The terahertz spectrometer for gas analysis according to the present invention comprises: a terahertz generation part for generating and outputting terahertz waves; a first chamber including a first waveguide and accommodating sample gas; a second chamber including a second waveguide and accommodating reference gas; an exhaust part for at least exhausting atmosphere inside the first chamber; a gas supply part for at least supplying the sample gas to the first chamber; a beam separating part for separating the terahertz waves into first terahertz waves and second terahertz waves and advancing the first terahertz waves and the second terahertz waves into the first chamber and the second chamber respectively; and a terahertz analysis part for detecting and analyzing sample waves which are output after the first terahertz waves pass the first waveguide of the first chamber, and reference waves which are output after the second terahertz waves pass the second waveguide of the second chamber.