SYSTEMS AND METHODS FOR VAPOR DELIVERY

摘要

A vapor delivery system comprises an ampoule for storing a liquid precursor, and a heater partially gasifying the liquid precursor. A first valve is connected to a push gas source and the ampoule. A second valve supplies a gasified precursor to a heated injection manifold. A valve manifold comprises: a first node connected to a discharge part of the heated injection manifold in a fluidic manner; a third valve having an inlet connected to the first node in a fluidic manner, and an outlet connected to vacuum in a fluidic manner; a fourth valve having an inlet part connected to the first node in a fluidic manner, and an outlet connected to a second node in a fluidic manner; a fifth valve having an outlet connected to the second node in a fluidic manner; and a sixth valve having an outlet connected to the second node in a fluidic manner. A gas distribution device is connected to the second node in a fluidic manner.