METHOD FOR MANAGING A SEMICONDUCTOR MANUFACTURING EQUIPMENT AND MANAGEMENT SYSTEM OF THE SAME

摘要

Disclosed are a method for managing semiconductor manufacturing equipment and a system for managing the same. The method includes a step of checking whether each of components is normally assembled by using the reflexibility and absorptance of a high frequency voltage provided to the components whenever the components are assembled according to a command of preventive maintenance for dissembling and cleaning the components of a chamber.