LASER PROCESSING DEVICE WITH FOCUS FINDING FUNCTION AND LASER PROCESSING METHOD

摘要

The present invention provides a laser processing device including a laser source; a beam splitter splitting a laser beam emitted from the laser source into a reflective beam and a penetrative beam; a first light collecting unit collecting the penetrative beam to a target object; a beam profiler receiving the laser beam, which passes through the first light collecting unit and the beam splitter after being reflected by the target object, and measuring a profile change of the laser beam in accordance with a position change of the target object; and a second light collecting unit interposed between the beam splitter and the beam profiler and collecting the laser beam passing through the first light collecting unit and the beam splitter to the beam profiler.