DUAL SERVO STAGE USING MAGNETIC LEVITATION TECHNOLOGY

摘要

According to an embodiment of the present invention, a dual servo stage using magnetic levitation technology, comprises: a coarse stage which operates and levitates by a planar motor composed of a two-dimensional magnet array and a plurality of coils disposed at an upper part of the two-dimensional magnet array with a pore; and a fine stage which operates and levitates by a plurality of voice coil motors on the upper part of the coarse stage.