SEPARATION METHOD, LIGHT-EMITTING DEVICE, MODULE, AND ELECTRONIC DEVICE

摘要

A method for manufacturing a flexible semiconductor device is disclosed. The present invention increases a yield in a separation process. A light emitting device having high light extraction efficiency is provided. The method comprises: a first step of forming a separation layer on a substrate; a second process of treating a surface of the separation layer with plasma; a third process of forming a layer to be separated on the separation layer; a fourth step of heating the separation layer and the layer to be separated; and a fifth step of separating the separation layer from the layer to be separated. The plasma treatment is performed under an atmosphere including nitrous oxide and silane.