发明名称 UNIT FOR HEATING A PRINTED CIRCUIT BOARD AND APPARATUS FOR BONDING DIES INCLUDING THE SAME
摘要 A substrate heating unit includes at least one vacuum plate, and at least two heating plates. The vacuum plate supports a substrate placed on an upper part and fixes the substrate. The heating plates are combined with a lower part of the vacuum plate to form at least two divided structures. The substrate is heated at different temperatures according to the divided structure.
申请公布号 KR101593833(B1) 申请公布日期 2016.02.12
申请号 KR20140140566 申请日期 2014.10.17
申请人 SEMES CO., LTD. 发明人 LIM, SOK TAEK;LEE, WON BAE
分类号 H01L21/324;H01L21/58;H01L21/603 主分类号 H01L21/324
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