| 摘要 |
The present invention relates to a support plate for effectively guiding and supporting a device for measuring the temperature of a wafer or a wafer carrier. The support plate includes a U-shaped body, a guide rail which is installed on an inner surface of the body in a longitudinal direction or in an extended direction of the body, a sensor connection part which lineally moves on the guide rail, and a fixing unit which fixes the sensor connection part to the body. |
