WIRE GRID POLARIZER AND METHOD FOR FABRICATING THE SAME
摘要
The wire grid polarizer with excellent optical character of the present invention includes: a substrate; a plurality of conductive wire patterns which protrude from the substrate and are in parallel; a first hard mask and a second hard mask which are arranged in the upper part of the conductive wire pattern; and a protection layer which is formed on the second hard mask. The ratio of the width of the vertical cross section of the second hard mask to the width of the vertical cross section of the first hard mask is 1 or more.
申请公布号
KR20160014835(A)
申请公布日期
2016.02.12
申请号
KR20140096550
申请日期
2014.07.29
申请人
SAMSUNG DISPLAY CO., LTD.
发明人
YANG, SUNG HOON;CHOI, SHIN IL;LEE, DAE YOUNG;JO, GUG RAE