| 发明名称 |
ACTIVELY-ALIGNED FINE METAL MASK |
| 摘要 |
The embodiments described herein generally relate to active alignment of a fine metal mask. The fine metal mask is connected with a frame through a plurality of microactuators. The microactuators can act on the fine metal mask to stretch the mask, reposition the mask or both. In this way, the position and size of the fine metal mask can be maintained in relation to the substrate. |
| 申请公布号 |
US2016043319(A1) |
申请公布日期 |
2016.02.11 |
| 申请号 |
US201414782500 |
申请日期 |
2014.04.21 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
WHITE John M.;VISSER Robert Jan;HAAS Dieter;VERCESI Tommaso;LOPP Andreas |
| 分类号 |
H01L51/00;H01L51/56;G02B26/02 |
主分类号 |
H01L51/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A masking device, comprising:
a fine metal mask having a pattern and a connection plate surrounding the pattern; and a plurality of microactuators coupled to the fine metal mask. |
| 地址 |
Santa Clara CA US |
