GETTER STRUCTURE AND METHOD FOR FORMING SUCH STRUCTURE

摘要

A getter structure and method wherein a layer of seed material is deposited on a predetermined region of a surface of a structure under conditions to form a plurality of nucleation sites on a surface of the structure. The nucleation sites have an average height over the surface area of the predetermined region of less than one molecule thick. Subsequently a getter material is deposited over the surface to form a plurality of getter material members projecting outwardly from the nucleation sites.

主权项

1. A method for forming a getter structure, comprising:
forming a plurality of nucleation sites of a seed material on a surface of the structure; and forming a plurality of getter material members projecting outwardly from the nucleation sites.