3-DOF MEMS PISTON-TUBE ELECTROSTATIC MICROACTUATOR

摘要

A three-degrees-of-freedom MEMS electrostatic piston-tube actuator is disclosed. The actuator comprises two structures. A structure that comprises a plurality of fixed piston-like electrodes that are attached to a base, and form the stator of the actuator. A second structure that comprises a plurality of moving tube-like electrodes that are attached to the body of the upper structure and form the rotor of the actuator. The rotor is attached to the stator through a mechanical spring. The rotor of the actuator provides a 3-DOF motion, comprising vertical translation and bi-axial rotation about the axes of the structures. The present piston-tube actuator utilizes a configuration that enables the use of wide area electrodes, and therefore, provides a high output force enabling translation of the rotor or a high output torque enabling rotation of the rotor.