发明名称 |
X-RAY APPARATUS AND STRUCTURE PRODUCTION METHOD |
摘要 |
An X-ray apparatus according to the present invention is provided with: a mounting plate for mounting an object to be measured; an X-ray irradiation unit for irradiating X-rays from above or below the mounting plate onto the object to be measured mounted on the mounting plate; an X-ray detection unit for acquiring a transmission image of the object to be measured irradiated by X-rays; and a bending control unit for controlling bending of the mounting plate. |
申请公布号 |
WO2016021031(A1) |
申请公布日期 |
2016.02.11 |
申请号 |
WO2014JP70942 |
申请日期 |
2014.08.07 |
申请人 |
NIKON CORPORATION |
发明人 |
TANAKA, TOSHIHISA;TAKEDA, SHINSUKE;SAKAGUCHI, NAOSHI |
分类号 |
G01N23/04 |
主分类号 |
G01N23/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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