发明名称 X-RAY APPARATUS AND STRUCTURE PRODUCTION METHOD
摘要 An X-ray apparatus according to the present invention is provided with: a mounting plate for mounting an object to be measured; an X-ray irradiation unit for irradiating X-rays from above or below the mounting plate onto the object to be measured mounted on the mounting plate; an X-ray detection unit for acquiring a transmission image of the object to be measured irradiated by X-rays; and a bending control unit for controlling bending of the mounting plate.
申请公布号 WO2016021031(A1) 申请公布日期 2016.02.11
申请号 WO2014JP70942 申请日期 2014.08.07
申请人 NIKON CORPORATION 发明人 TANAKA, TOSHIHISA;TAKEDA, SHINSUKE;SAKAGUCHI, NAOSHI
分类号 G01N23/04 主分类号 G01N23/04
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