发明名称 HIGH-EFFICIENCY LINE-FORMING OPTICAL SYSTEMS AND METHODS
摘要 Disclosed are a line-forming optical system and method that form a line image with high-efficiency. The method of the present invention comprises the following steps: forming a laser beam having a first intensity profile having a Gaussian distribution in a first direction; and passing at least 50% of the laser beam in the first direction to form a first transmitted light. The method also comprises the following steps: focusing the first transmitted light at an intermediate image plane to define a second intensity profile having a central peak and first side peaks directly adjacent to the central peak; truncating an end of the second intensity profile within each of the first side peaks to define a second transmitted light; and forming the line image at an image plane from the second transmitted light.
申请公布号 KR20160014525(A) 申请公布日期 2016.02.11
申请号 KR20150097237 申请日期 2015.07.08
申请人 ULTRATECH INC. 发明人 ANIKITCHEV SERGUEI
分类号 H01S5/20 主分类号 H01S5/20
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