DEVICE USING A PIEZOELECTRIC ELEMENT AND METHOD FOR MANUFACTURING THE SAME

摘要

An inkjet printing head 1 includes a piezoelectric element 6 having a lower electrode 7, a piezoelectric film 8 formed above the lower electrode 7, and an upper electrode 9 formed above the piezoelectric film 8, a hydrogen barrier film 13 covering an entirety of a side surface of the upper electrode 9 and the piezoelectric film 8, and an interlayer insulating film 14 that has an opening 17 at an upper surface center of the upper electrode 9, is laminated on the hydrogen barrier film 13, and faces the entirety of the side surface of the upper electrode 9 and the piezoelectric film 8 across the hydrogen barrier film 13.

主权项

1. A device using a piezoelectric element comprising:
a piezoelectric element having a lower electrode, a piezoelectric film formed above the lower electrode, and an upper electrode formed above the piezoelectric film; a hydrogen barrier film covering an entirety of a side surface of the upper electrode and the piezoelectric film, and; an interlayer insulating film having an opening at an upper surface center of the upper electrode, being laminated on the hydrogen barrier film, and facing the entirety of the side surface of the upper electrode and the piezoelectric film across the hydrogen barrier film.